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Auxiliary Equipment Maintenance
Wafer Defect observing instrument:HS-WDI
Semi-Automatic Contactless Wafer Detector:HS-NCS-200SA
Wafer Roughness Detector:HS-SRT-301
4-Probe Resistivity and Resistance Tester:HS-MPRT-5
Silicon O/C Content Tester:HS-OCT-2000
Silicon Phosphor and Boron Analyze system: HS-ICP-MS
Silicon O/C Content Tester:HS-OCT-6700
Large Range Type Tester:HS-PSTT
Large Range Resistivity Tester:HS-SFRT
Large Range Resistivity Tester:HS-POSRT
Silicon Type Tester:HS-HCTT
Quick Silicon Discriminator:HS-QSD
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